Micro-Electro-Mechanical Systems, or MEMS, are specialized silicon chips that incorporate not only miniaturized electronic circuits (the "electro" component) but also a "mechanical" part, such as tiny arms, gears, or springs. These chips, therefore, may possess not only the ability to process data, but also, etched into its surface, the ability to collect data in the form of some kind of sensor. Needless to say, the sensors are tiny, going down to the scale of millionths of a meter, or micrometers.
The term MEMS is itself thought to have arisen as a consequence of a 1987 gathering, called the Micro Robots and Teleoperators Workshop, conducted by the International Electrical and Electronics Engineers." Later, in 1988, a reliable method of bonding silicon components onto silicon chips was demonstrated.
Controllers in some video games, for example, utilize tiny accelerometers within their control pods to measure tilt, shock, and acceleration. While this is obviously
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